Important Parameters of Excimer Lasers: Relevant Topics of Current Research

K L Kompa

doi:10.1117/12.938083

21 October 1986 Important Parameters of Excimer Lasers: Relevant Topics of Current Research

K L Kompa

Proceedings Volume 0650, High Power Lasers and Their Industrial Applications; (1986) https://doi.org/10.1117/12.938083
Event: 1986 International Symposium/Innsbruck, 1986, Innsbruck, Austria

Abstract

Excimer lasers have become one of the most important types of lasers for applications in materials technology, chemical processing, atmospheric diagnostics and research in the chemical and biological sciences. This paper attempts a brief summary of the present state of development and future perspectives for this class of lasers. The discussion is organized in three sections according to the following list of topics: I) Laser physics and spectroscopy - Survey of emission wavelengths and types of transitions - Laser kinetics - Gain, amplification, energy extraction, short pulses - Frequency variation to longer and shorter wavelengths - New systems II) Performance and output - Pumping schemes and prei-onization - Chemicals and materials problems - Excimer laser performance data: Present and future III) Selected applications - Basic research - Remote sensing - Materials working - Chemical processing - Treatment of biosystems

Citation Download Citation

K L Kompa "Important Parameters of Excimer Lasers: Relevant Topics of Current Research", Proc. SPIE 0650, High Power Lasers and Their Industrial Applications, (21 October 1986); https://doi.org/10.1117/12.938083

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