3 November 1986 Integrated Optics On Silicon Substrate : A Way To Achieve Complex Optical Circuits
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Proceedings Volume 0651, Integrated Optical Circuit Engineering III; (1986); doi: 10.1117/12.938135
Event: 1986 International Symposium/Innsbruck, 1986, Innsbruck, Austria
Abstract
We describe the planar technology used on silicon substrate to achieve two special devices : a folded optical spectrum analyser featuring 500 MHz bandwith and a Michelson interferometer used as a vibration sensor.
© (1986) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
S. Valette, P. Mottier, J. Lizet, P. Gidon, J. P. Jadot, D. Villani, "Integrated Optics On Silicon Substrate : A Way To Achieve Complex Optical Circuits", Proc. SPIE 0651, Integrated Optical Circuit Engineering III, (3 November 1986); doi: 10.1117/12.938135; https://doi.org/10.1117/12.938135
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KEYWORDS
Integrated optics

Waveguides

Silicon

Mirrors

Silica

Fresnel lenses

Refractive index

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