3 November 1986 Optical Waveguide Pressure Sensor
Author Affiliations +
Proceedings Volume 0651, Integrated Optical Circuit Engineering III; (1986) https://doi.org/10.1117/12.938163
Event: 1986 International Symposium/Innsbruck, 1986, Innsbruck, Austria
This paper proposes and demonstrates a new type of pressure sensor, using a metal-clad ion-exchanged glass waveguide with a liquid buffer layer. The thickness of the buffer layer is variable with pressure, which results in light intensity modulation of guided modes. In the tested waveguide pressure sensor in which water is used as the buffer layer, 80-% decrease of the output light intensity has been obtained with respect to an applied pressure of approximately 300 torr.
© (1986) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Masamitsu Haruna, Masamitsu Haruna, Hiroshi Nishihara, Hiroshi Nishihara, "Optical Waveguide Pressure Sensor", Proc. SPIE 0651, Integrated Optical Circuit Engineering III, (3 November 1986); doi: 10.1117/12.938163; https://doi.org/10.1117/12.938163


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