13 October 1986 Inverse Synthesis For Analyzing The Variations Of Spectral Properties Of Optical Multilayers From Different Coating Runs
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Proceedings Volume 0652, Thin Film Technologies II; (1986) https://doi.org/10.1117/12.938367
Event: 1986 International Symposium/Innsbruck, 1986, Innsbruck, Austria
Abstract
The inverse synthesis method is investigated for its ability to deduce the construction parameters of a complete layer system from its reflectance or transmittance curve at nor-mal incidence. To avoid multiple solutions the theoretical design of the layer system is used as a starting design and by subsequent optimization the actual construction parameters can be found. The impetus of this work was to develop a tool for the thin film engineer to speed up thin film development. A 6-layer broadband antireflection coating is used as an example for testing the inverse synthesis method. The necessary measurement accuracy for the spectral reflectance is discussed. A series of 10 successive production runs is analyzed. The variations of layer thicknesses from run to run are given.
© (1986) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
W Klug, M Boos, R Herrmann, H Schwiecker, "Inverse Synthesis For Analyzing The Variations Of Spectral Properties Of Optical Multilayers From Different Coating Runs", Proc. SPIE 0652, Thin Film Technologies II, (13 October 1986); doi: 10.1117/12.938367; https://doi.org/10.1117/12.938367
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