13 October 1986 Optical Monitoring: Comparison Of Different Monitoring Strategies With Respect To The Resulting Reproducibility To The Completed Layer Systems
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Proceedings Volume 0652, Thin Film Technologies II; (1986) https://doi.org/10.1117/12.938353
Event: 1986 International Symposium/Innsbruck, 1986, Innsbruck, Austria
Abstract
A broadband antireflection coating on BK 7 was used to investigate the influence of dif-ferent optical monitoring strategies on the reproducibility of the completed layer system. The coating design consisted of 6 alternating layers of MgF2 and TiO2 of which 4 layers had optical thicknesses less than a quarterwave. Two different monitoring strategies were tes-ted: single test slide monitoring (all layers on one test slide) and monitoring of each layer on a separate test slide. Each strategy was tested by performing 10 production runs in a completely automated coating system equipped with a monochromatic photometer. The single test slide method proved to be more reproducible for the production of this specific layer system.
© (1986) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A Zoller, A Zoller, R Herrmann, R Herrmann, W Klug, W Klug, W Zultzke, W Zultzke, } "Optical Monitoring: Comparison Of Different Monitoring Strategies With Respect To The Resulting Reproducibility To The Completed Layer Systems", Proc. SPIE 0652, Thin Film Technologies II, (13 October 1986); doi: 10.1117/12.938353; https://doi.org/10.1117/12.938353
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