13 October 1986 Total Integrated Scatter Measurement System For Quality Assessment Of Coatings On Optical Surfaces
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Proceedings Volume 0652, Thin Film Technologies II; (1986) https://doi.org/10.1117/12.938389
Event: 1986 International Symposium/Innsbruck, 1986, Innsbruck, Austria
Abstract
Total integrated scatter (TIS) measurements are discussed on the basis of the proposed ASTM standard for surface characterization. A TIS-apparatus built in accordance with this standard is presented and measurements are reported for samples ranging in roughness from 1 A to 150 A. Si-wafers are demonstrated to possess excellent surface quality and made measurements of roughness from an 1100 A Al-film possible.
© (1986) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Lars Mattsson, "Total Integrated Scatter Measurement System For Quality Assessment Of Coatings On Optical Surfaces", Proc. SPIE 0652, Thin Film Technologies II, (13 October 1986); doi: 10.1117/12.938389; https://doi.org/10.1117/12.938389
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