Cadmium-Tin Oxide Transparent Conductive Thin Films

T Stapinski; E Leja; K Marszalek

doi:10.1117/12.938320

24 September 1986 Cadmium-Tin Oxide Transparent Conductive Thin Films

T Stapinski, E Leja, K Marszalek

Proceedings Volume 0653, Optical Materials Technology for Energy Efficiency and Solar Energy Conversion V; (1986) https://doi.org/10.1117/12.938320
Event: 1986 International Symposium/Innsbruck, 1986, Innsbruck, Austria

Abstract

Cadmium-tin oxide (CTO) films have been prepared by d.c. reactive sputtering of Cd-Sn alloy targets in Ar-02 gas mixture. The electrical, optical and structural properties as well as the chemical composition of transparent conducting CTO films were found to depend on sputtering conditions. The value of optical band gap, optical constants, effective mass and relaxation time of electrons have been determined.

Citation Download Citation

T Stapinski, E Leja, and K Marszalek "Cadmium-Tin Oxide Transparent Conductive Thin Films", Proc. SPIE 0653, Optical Materials Technology for Energy Efficiency and Solar Energy Conversion V, (24 September 1986); https://doi.org/10.1117/12.938320

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