24 September 1986 Preparation Of Transparent Conducting Zinc Oxide Films By RF Reactive Sputtering
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Abstract
Transparent conducting zinc oxide films have been prepared by reactive sputtering in an Ar/H2 mixture. The optical and electrical properties of the films are presented and discussed. The effects of some post-deposition thermal treatment have been also investigated. ZnO/CdTe heterojunctions have .been prepared by sputtering ZnO films on CdTe single crystals. The photovoltaic conversion efficiencies of the obtained solar cells was 6.8%.
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L Vasanelli, A Valentini, A Losacco, "Preparation Of Transparent Conducting Zinc Oxide Films By RF Reactive Sputtering", Proc. SPIE 0653, Optical Materials Technology for Energy Efficiency and Solar Energy Conversion V, (24 September 1986); doi: 10.1117/12.938319; https://doi.org/10.1117/12.938319
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