The Saddle Field Source In Optical Thin Film Processing

D Roger Evans

doi:10.1117/12.938341

24 September 1986 The Saddle Field Source In Optical Thin Film Processing

D Roger Evans

Proceedings Volume 0653, Optical Materials Technology for Energy Efficiency and Solar Energy Conversion V; (1986) https://doi.org/10.1117/12.938341
Event: 1986 International Symposium/Innsbruck, 1986, Innsbruck, Austria

Abstract

The saddle field source has for many years played a unique role in the preparation of specimens for electron microscopy and in mass spectrometry analysis. It is the purpose of this work to show where the advantages of this unique source are now being successfully exploited in the field of thin film deposition.

Citation Download Citation

D Roger Evans "The Saddle Field Source In Optical Thin Film Processing", Proc. SPIE 0653, Optical Materials Technology for Energy Efficiency and Solar Energy Conversion V, (24 September 1986); https://doi.org/10.1117/12.938341

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