Automated Electronic Speckle Pattern Interferometry - A Tool for Inspection

K Paler

doi:10.1117/12.938273

17 November 1986 Automated Electronic Speckle Pattern Interferometry - A Tool for Inspection

K Paler

Proceedings Volume 0654, Automatic Optical Inspection; (1986) https://doi.org/10.1117/12.938273
Event: 1986 International Symposium/Innsbruck, 1986, Innsbruck, Austria

Abstract

Developments towards an automatic inspection system based on Electronic Speckle Pattern Interferometry (ESPI) are presented. Emphasis is placed on the techniques for the automatic analysis of the Speckle Pattern correlation fringes to produce three dimensional surface profiles from which various physical parameters can be derived. The range of application and general system design principles will be discussed.

Citation Download Citation

K Paler "Automated Electronic Speckle Pattern Interferometry - A Tool for Inspection", Proc. SPIE 0654, Automatic Optical Inspection, (17 November 1986); https://doi.org/10.1117/12.938273

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