Developments towards an automatic inspection system based on Electronic Speckle Pattern Interferometry (ESPI) are presented. Emphasis is placed on the techniques for the automatic analysis of the Speckle Pattern correlation fringes to produce three dimensional surface profiles from which various physical parameters can be derived. The range of application and general system design principles will be discussed.
K Paler, K Paler,
"Automated Electronic Speckle Pattern Interferometry - A Tool for Inspection", Proc. SPIE 0654, Automatic Optical Inspection, (17 November 1986); doi: 10.1117/12.938273; https://doi.org/10.1117/12.938273