Optical Characterization Of Microrough Surfaces : Limitations And Success Of The Theory

D Maystre; J P Rossi; M Saillard

doi:10.1117/12.938269

17 November 1986 Optical Characterization Of Microrough Surfaces : Limitations And Success Of The Theory

D Maystre, J P Rossi, M Saillard

Proceedings Volume 0654, Automatic Optical Inspection; (1986) https://doi.org/10.1117/12.938269
Event: 1986 International Symposium/Innsbruck, 1986, Innsbruck, Austria

Abstract

A brief review of the theories used to solve the problems of characterization of rough surfaces from optical measurements is made. A special attention is paid to the very important case of microrough surfaces, where the order of magnitude of the width of the irregularities is less than ten microns. We compare the limits of validity of the main theories : theory of speckle developed in Optics, approximate electromagnetic theories and rigorous electromagnetic theories. We show that, with the recent improvements of the rigorous theory, very interesting numerical results can be obtained, even though the numerical limitations cannot be neglected. For example, we use rigorous numerical results to show that two random microrough surfaces having the same correlation function, illuminated by the same incident beam, can generate diffraction patterns at infinity having very different statistical properties.

Citation Download Citation

D Maystre, J P Rossi, and M Saillard "Optical Characterization Of Microrough Surfaces : Limitations And Success Of The Theory", Proc. SPIE 0654, Automatic Optical Inspection, (17 November 1986); https://doi.org/10.1117/12.938269

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available