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17 November 1986 Optical Characterization Of Microrough Surfaces : Limitations And Success Of The Theory
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Proceedings Volume 0654, Automatic Optical Inspection; (1986) https://doi.org/10.1117/12.938269
Event: 1986 International Symposium/Innsbruck, 1986, Innsbruck, Austria
Abstract
A brief review of the theories used to solve the problems of characterization of rough surfaces from optical measurements is made. A special attention is paid to the very important case of microrough surfaces, where the order of magnitude of the width of the irregularities is less than ten microns. We compare the limits of validity of the main theories : theory of speckle developed in Optics, approximate electromagnetic theories and rigorous electromagnetic theories. We show that, with the recent improvements of the rigorous theory, very interesting numerical results can be obtained, even though the numerical limitations cannot be neglected. For example, we use rigorous numerical results to show that two random microrough surfaces having the same correlation function, illuminated by the same incident beam, can generate diffraction patterns at infinity having very different statistical properties.
© (1986) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
D Maystre, J P Rossi, and M Saillard "Optical Characterization Of Microrough Surfaces : Limitations And Success Of The Theory", Proc. SPIE 0654, Automatic Optical Inspection, (17 November 1986); https://doi.org/10.1117/12.938269
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