Paper
17 November 1986 Optical Sensors For Automated Surface Metrology
Lionel R Baker
Author Affiliations +
Proceedings Volume 0654, Automatic Optical Inspection; (1986) https://doi.org/10.1117/12.938271
Event: 1986 International Symposium/Innsbruck, 1986, Innsbruck, Austria
Abstract
The characteristics of surface required to ensure fitness-for-purpose depend greatly on the particular functions to be performed by that surface. Although still widely used, the electroniccontacting stylus leaves much to be desired in terms of ease of use, area coverage and cost. Alternative means for assessing surface texture including roughness, waviness and flaws have been widely studied in recent years in an attempt to produce a measuring system in keeping with the requirements of modern manufacturing. A review of the methods of operation of optical sensors, including an account of their principal advantages and disadvantages, will be presented together with an indication of how recently developed methods might overcome some of the application problems.
© (1986) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Lionel R Baker "Optical Sensors For Automated Surface Metrology", Proc. SPIE 0654, Automatic Optical Inspection, (17 November 1986); https://doi.org/10.1117/12.938271
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CITATIONS
Cited by 2 scholarly publications.
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KEYWORDS
Metrology

Optical sensors

Wavefronts

Light scattering

Sensors

Reflectivity

Surface finishing

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