31 October 1986 Fabrication Of Aspheric Germanium-Lens Surfaces By Ion Milling
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Abstract
Ion milling was studied as a method for removing a well defined amount of material from a spherically shaped surface to fabricate high quality aspheric germanium lenses. The ion-current density of the beam was determined as a function of the acceleration voltage and argon-gas flow in order to find near optimum conditions for smooth etching of the lens surface. The sputtering yield was studied as a function of the angle of incidence of the beam with respect to the target surface. Based upon these data, a computer program was designed, which controls the dwell time and the corresponding position of the lens with respect to the ion beam such as to generate a prescribed surface shape.
© (1986) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
O Podzimek, L H.J.F Beckmann, J A Brok, "Fabrication Of Aspheric Germanium-Lens Surfaces By Ion Milling", Proc. SPIE 0655, Optical System Design, Analysis, Production for Advanced Technology Systems, (31 October 1986); doi: 10.1117/12.938446; https://doi.org/10.1117/12.938446
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