20 October 1986 Heterodyne Interferometer For Surface Profile Measurements In The Angstrom Region
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Abstract
A fast and versatile interferometric system for measuring surface profiles of flat optical surfaces without the need of a separate reference surface will be presented. The instrument is capable of resolving height variations of about 50 Å, while lateral resolution is 3 m. The profile measurement takes 20 seconds, and statistical properties like rms height, slope and spectral density can be calculated from the profile. No extensive alignment of the sample is needed, and scan lengths of 100 micrometers to several millimeters are obtainable.
© (1986) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dan Pantzer, Jacob Politch, Leif Ek, "Heterodyne Interferometer For Surface Profile Measurements In The Angstrom Region", Proc. SPIE 0656, Contemporary Optical Instrument Design, Fabrication, and Testing, (20 October 1986); doi: 10.1117/12.938482; https://doi.org/10.1117/12.938482
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