Optical Roughness Measurements Of Industrial Surfaces

David Gilsinn; Theodore Vorburger; Lin-Xiang Cao; Charles Giauque; Fredric Scire; E.Clayton Teague

doi:10.1117/12.938768

23 October 1986 Optical Roughness Measurements Of Industrial Surfaces

David Gilsinn, Theodore Vorburger, Lin-Xiang Cao, Charles Giauque, Fredric Scire, E.Clayton Teague

Proceedings Volume 0665, Optical Techniques for Industrial Inspection; (1986) https://doi.org/10.1117/12.938768
Event: 1986 Quebec Symposium, 1986, Quebec City, Canada

Abstract

This paper reviews our efforts to develop the theory and instrumentation needed to measure surface roughness of manufactured surfaces by optical scattering methods. We are addressing three key problems: developing a valid and sufficient optical scattering theory for this roughness range, applying appropriate mathematical inversion techniques so that practical roughness parameters can be calculated from scattering distributions, and finally evaluating a compact commercial instrument for a wide variety of problems. Recent results from our group suggest that the simple phase screen approximation model of optical scattering validly describes light scattering from machined metal surfaces with a predominant surface lay in the 0.01 pm R to 3.0 pm R range. A model for scattering in the entire farr-field hemisphere and obsera vations on our r approach to the inverse problem is given.

Citation Download Citation

David Gilsinn, Theodore Vorburger, Lin-Xiang Cao, Charles Giauque, Fredric Scire, and E.Clayton Teague "Optical Roughness Measurements Of Industrial Surfaces", Proc. SPIE 0665, Optical Techniques for Industrial Inspection, (23 October 1986); https://doi.org/10.1117/12.938768

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