23 October 1986 Optical Roughness Measurements Of Industrial Surfaces
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This paper reviews our efforts to develop the theory and instrumentation needed to measure surface roughness of manufactured surfaces by optical scattering methods. We are addressing three key problems: developing a valid and sufficient optical scattering theory for this roughness range, applying appropriate mathematical inversion techniques so that practical roughness parameters can be calculated from scattering distributions, and finally evaluating a compact commercial instrument for a wide variety of problems. Recent results from our group suggest that the simple phase screen approximation model of optical scattering validly describes light scattering from machined metal surfaces with a predominant surface lay in the 0.01 pm R to 3.0 pm R range. A model for scattering in the entire farr-field hemisphere and obsera vations on our r approach to the inverse problem is given.
© (1986) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
David Gilsinn, David Gilsinn, Theodore Vorburger, Theodore Vorburger, Lin-Xiang Cao, Lin-Xiang Cao, Charles Giauque, Charles Giauque, Fredric Scire, Fredric Scire, E.Clayton Teague, E.Clayton Teague, } "Optical Roughness Measurements Of Industrial Surfaces", Proc. SPIE 0665, Optical Techniques for Industrial Inspection, (23 October 1986); doi: 10.1117/12.938768; https://doi.org/10.1117/12.938768


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