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12 November 1986 Applications Of Beam-Solid Interactions In Semiconductor Material And Device Processing
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Abstract
Pulsed or scanned energy beams have been shown to be very useful for many semiconductor applications, ranging from annealing of ion-implanted damage to preparation of materials.
© (1986) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
John C.C Fan "Applications Of Beam-Solid Interactions In Semiconductor Material And Device Processing", Proc. SPIE 0668, Laser Processing: Fundamentals, Applications, and Systems Engineering, (12 November 1986); https://doi.org/10.1117/12.938888
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