12 November 1986 The Development Of Industrial Excimer Lasers
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Abstract
The first discharge pumped excimer lasers introduced in the 1970's were derivatives of N2 and C02 TEA lasers. They had spatially non-uniform outputs, relatively small output energies, low average powers, short operating lifetimes, and poor reliability. Today, more than a decade later, excimer lasers are just now maturing to the point where they are starting to enter the industrial workplace. This paper will review the transition from CO2/N2 to excimer technology, the engineering hurdles excimer lasers must overcome to make them viable industrial tools, and the current state of the "industrial excimer laser".
© (1986) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jeffrey I Levatter, "The Development Of Industrial Excimer Lasers", Proc. SPIE 0668, Laser Processing: Fundamentals, Applications, and Systems Engineering, (12 November 1986); doi: 10.1117/12.938923; https://doi.org/10.1117/12.938923
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