The Fiber-Optic Instrument For Extremely Small Roughness Measurement

A. Domanski; W. Ejchart; J. Jedrzejewski; R. M. Siegoczynski; W. Tlaczala

doi:10.1117/12.938978

10 November 1986 The Fiber-Optic Instrument For Extremely Small Roughness Measurement

A. Domanski, W. Ejchart, J. Jedrzejewski, R. M. Siegoczynski, W. Tlaczala

Proceedings Volume 0670, Optical Fibres and Their Applications IV; (1986) https://doi.org/10.1117/12.938978
Event: Optical Fibres and Their Applications, 1986, Warsaw, Poland

Abstract

The fiber-optic instrument of ability to measure roughness of surfaces has been built. It works in the range of profil mean deviation 20 nm <Ra <150 nm. Light of 0,88 μm wave length is led by the fiber to the surface and is analysed by other fiber fixed in a focal plane of the lens. The device is used to check the base plate in microelectronic semi-conductor technics.

Citation Download Citation

A. Domanski, W. Ejchart, J. Jedrzejewski, R. M. Siegoczynski, and W. Tlaczala "The Fiber-Optic Instrument For Extremely Small Roughness Measurement", Proc. SPIE 0670, Optical Fibres and Their Applications IV, (10 November 1986); https://doi.org/10.1117/12.938978

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