A New Method Of Surface Roughness Measurement Using Far Field Speckle

Liu Rong-ping; Liu Pei-sen

doi:10.1117/12.939092

15 January 1988 A New Method Of Surface Roughness Measurement Using Far Field Speckle

Liu Rong-ping, Liu Pei-sen

Proceedings Volume 0673, Holography Applications; (1988) https://doi.org/10.1117/12.939092
Event: Holography Applications, 1986, Beijing, China

Abstract

In this paper, an expression which relates the normalized ensemble average of central peak intensity in the far field speckle pattern to the variance and correlation length of a rough surface under measurement is derived theoretically. On this basis, a new method of measuring surface roughness is suggested, and computer simulation experiment is conducted. The results obtained are in good agreement with the theoretical analysis.

Citation Download Citation

Liu Rong-ping and Liu Pei-sen "A New Method Of Surface Roughness Measurement Using Far Field Speckle", Proc. SPIE 0673, Holography Applications, (15 January 1988); https://doi.org/10.1117/12.939092

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