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15 January 1988 Infrared Holography Using A Co2 Laser And Its Application To Si-Wafer Inspection
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Proceedings Volume 0673, Holography Applications; (1988) https://doi.org/10.1117/12.939032
Event: Holography Applications, 1986, Beijing, China
Abstract
The results of the development of IR holography at 10.6μm wavelength and its application to inspection of nontransparent metal object and transparent Si-wafer are presented. Polyvinyl alcohol film and oil film have been used as recording media.
© (1988) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Guanchao Sun and Zijuen Yuan "Infrared Holography Using A Co2 Laser And Its Application To Si-Wafer Inspection", Proc. SPIE 0673, Holography Applications, (15 January 1988); https://doi.org/10.1117/12.939032
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