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3 June 1987 Frequency Response Characteristics Of An Optical Scatterometer And A Surface Profilometer
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Abstract
The frequency response characteristics of an angle-resolved optical scatterometer and a mechanical profilometer are examined. The transfer function for the scatterometer is found to be constant within the spatial frequency bandwidth of the system. The mechanical profilometer is found to have a nonlinear response. The effect of the nonlinearity on the frequency response of the mechanical profilometer is examined.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
G A Al-Jumaily, S R Wilson, and J R McNeil "Frequency Response Characteristics Of An Optical Scatterometer And A Surface Profilometer", Proc. SPIE 0675, Stray Radiation V, (3 June 1987); https://doi.org/10.1117/12.939477
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