3 June 1987 Near-Specular Performance Of A Portable Scatterometer
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Abstract
A helium-neon portable scatterometer that was built and described previously has been modified. The intent was to obtain better data at angles very close to specular. We incorporated a twelve-element, linear array of silicon detectors in place of the first detector near the specular reflection direction, and removed the collimator to reduce the beam diameter. Attention was paid to scattered light from the instrument. A new scheme to orient the instrument to the sample surface using the array and the specular beam is described. Design details of the detection system capable of detecting signals ranging over five orders of magnitude and utilizing lock-in detection software are given. Results showing that the modification improved the scatterometer performance so that a Bidirectional Reflectance Distribution Function (BRDF) value of 1 sr-1 at one degree from specular can be measured with reasonable accuracy for a specular sample are discussed.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kathleen A Magee, Kathleen A Magee, William L Wolfe, William L Wolfe, } "Near-Specular Performance Of A Portable Scatterometer", Proc. SPIE 0675, Stray Radiation V, (3 June 1987); doi: 10.1117/12.939502; https://doi.org/10.1117/12.939502
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