Nondestructive Evaluation Of Surface Roughness In The 0.01- To 1.0-Pm Range Using Infrared Ellipsometry

S F Nee; H E Bennett

doi:10.1117/12.939503

3 June 1987 Nondestructive Evaluation Of Surface Roughness In The 0.01- To 1.0-μm Range Using Infrared Ellipsometry

S F Nee, H E Bennett

Proceedings Volume 0675, Stray Radiation V; (1987) https://doi.org/10.1117/12.939503
Event: 30th Annual Technical Symposium, 1986, San Diego, United States

Abstract

Using effective medium theory, the surface roughness and the void fraction of very rough surfaces can be measured nondestructively using infrared ellipsometry. The results correlate well with stylus measurements in cases where the latter can be made. The ellipsometric technique may be useful in evaluating the roughness of optical baffle materials, which are usually too rough to be conveniently measured using other techniques.

Citation Download Citation

S F Nee and H E Bennett "Nondestructive Evaluation Of Surface Roughness In The 0.01- To 1.0-μm Range Using Infrared Ellipsometry", Proc. SPIE 0675, Stray Radiation V, (3 June 1987); https://doi.org/10.1117/12.939503

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