3 June 1987 Nondestructive Evaluation Of Surface Roughness In The 0.01- To 1.0-μm Range Using Infrared Ellipsometry
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Abstract
Using effective medium theory, the surface roughness and the void fraction of very rough surfaces can be measured nondestructively using infrared ellipsometry. The results correlate well with stylus measurements in cases where the latter can be made. The ellipsometric technique may be useful in evaluating the roughness of optical baffle materials, which are usually too rough to be conveniently measured using other techniques.
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S F Nee, H E Bennett, "Nondestructive Evaluation Of Surface Roughness In The 0.01- To 1.0-μm Range Using Infrared Ellipsometry", Proc. SPIE 0675, Stray Radiation V, (3 June 1987); doi: 10.1117/12.939503; https://doi.org/10.1117/12.939503
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