Optical Scatter Characteristics And Surface Smoothing Effects In Coated Metal Surfaces

J R McNeil; G A Al Jumaily

doi:10.1117/12.939483

3 June 1987 Optical Scatter Characteristics And Surface Smoothing Effects In Coated Metal Surfaces

J R McNeil, G A Al Jumaily

Proceedings Volume 0675, Stray Radiation V; (1987) https://doi.org/10.1117/12.939483
Event: 30th Annual Technical Symposium, 1986, San Diego, United States

Abstract

Deposition of 0.1 to 1.0 μM thick metal films on a CaF2 coated Si wafer causes a reduction in optical scatter and related microroughness. This effect is not observed when the coated surfaces are examined using a surface profilometer (Talystep). Scanning electron micrographs indicate that coated surfaces are smoother than uncoated surfaces.

Citation Download Citation

J R McNeil and G A Al Jumaily "Optical Scatter Characteristics And Surface Smoothing Effects In Coated Metal Surfaces", Proc. SPIE 0675, Stray Radiation V, (3 June 1987); https://doi.org/10.1117/12.939483

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