Translator Disclaimer
3 June 1987 Oxygen Ion Cleaning Of Organic Contaminants
Author Affiliations +
Abstract
An experiment using low energy oxygen ions to clean organic films from bare aluminum mirrors was performed. Film removal was determined by measuring the reflectance of the mirrors in the ultraviolet region of the spectrum. The results of this study show that complete removal of hydrocarbon films is obtainable. This method may not be fully effective in removing silicon-based polymers. The removal rate for a hydrocarbon oil contami nant was determined to be 2.1 X 10-14 Å/ion.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
T J Deguchi, G R Sasaki, and R J Champetier "Oxygen Ion Cleaning Of Organic Contaminants", Proc. SPIE 0675, Stray Radiation V, (3 June 1987); https://doi.org/10.1117/12.939506
PROCEEDINGS
8 PAGES


SHARE
Advertisement
Advertisement
Back to Top