Particulate Contamination Control

J A Muscari

doi:10.1117/12.939505

3 June 1987 Particulate Contamination Control

J A Muscari

Proceedings Volume 0675, Stray Radiation V; (1987) https://doi.org/10.1117/12.939505
Event: 30th Annual Technical Symposium, 1986, San Diego, United States

Abstract

Low scatter optical surfaces degrade as a function of time even under controlled clean room conditions. A technique to determine the clean room cleanliness level and period of exposure to achieve a given change in thebidirectional reflectance distribution function is described. Class 10 clean rooms will protect low scatter optics during assembly and test.

Citation Download Citation

J A Muscari "Particulate Contamination Control", Proc. SPIE 0675, Stray Radiation V, (3 June 1987); https://doi.org/10.1117/12.939505

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