3 June 1987 Particulate Contamination Control
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Abstract
Low scatter optical surfaces degrade as a function of time even under controlled clean room conditions. A technique to determine the clean room cleanliness level and period of exposure to achieve a given change in thebidirectional reflectance distribution function is described. Class 10 clean rooms will protect low scatter optics during assembly and test.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J A Muscari, "Particulate Contamination Control", Proc. SPIE 0675, Stray Radiation V, (3 June 1987); doi: 10.1117/12.939505; https://doi.org/10.1117/12.939505
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