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3 June 1987 The Application Of Angular Resolved Scatter To The Documentation Of Damage To Smooth Mirrors
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Abstract
Mirrors designed to survive exposure to damaging radiation are being irradiated and then measured to determine the mechanisms of failure and to improve the ability of analysis codes to predict an exposure damage threshold. The differences between survival and catastrophic failure are easily recognized and recorded by macro photography. However, the goal of this project is to quantify the onset of mirror degradation utilizing non contact methods that have good measurement sensitivity to small changes in reflectivity (material properties) and light scatter (roughness). A new angular resolved scatterometer is described that has an extended dynamic range and integrated analysis capable of displaying the surface power spectral density (PSD) over large bandwidths of surface spatial frequencies. Graphical displays of the scattered light power before and after exposure to the radiation are compared and integrated over equivalent spatial bandwidths of sensitivity for other instruments to compare calculated RMS roughness values.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Calvin H Gillespie, David F Edwards, and John C Stover "The Application Of Angular Resolved Scatter To The Documentation Of Damage To Smooth Mirrors", Proc. SPIE 0675, Stray Radiation V, (3 June 1987); https://doi.org/10.1117/12.939481
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