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13 February 1987 Models For The Finish Of Precision Machined Optical Surfaces
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Abstract
This paper discusses models for the topographic finish of single-point machined surfaces which involve the randomization or "jittering" of one or more machining parameters. Results are described in terms of the two statistical properties of finish which are important for optical surfaces: its root-mean-square surface roughness and its power spectral density. Analytic examples are presented to illustrate general results and to provide a touchstone for more realistic numerical computations. These results are also directly applicable to the discussion of ruling errors in diffraction gratings.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
E L Church "Models For The Finish Of Precision Machined Optical Surfaces", Proc. SPIE 0676, Ultraprecision Machining and Automated Fabrication of Optics, (13 February 1987); https://doi.org/10.1117/12.939528
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