23 December 1986 Ambient Temperature Deposition Of MgF2 With Noble And Fluorocarbon Ion Assistance
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Abstract
We have investigated the properties of magnesium fluoride films made using ion assisted deposition, with argon or Freon as the source gas. The effect of the ion species and residual gases on the chemical, physical, and optical properties have been determined. For all films, the optical performance is strongly depen-dent on the presence of residual oxygen-bearing gases. For the Freon bombarded films the incorporation of carbon is not seen to degrade their transparency, and a more stoichiometric Mg:F ratio is acheived.
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U J Gibson, U J Gibson, C M Kennemore, C M Kennemore, } "Ambient Temperature Deposition Of MgF2 With Noble And Fluorocarbon Ion Assistance", Proc. SPIE 0678, Optical Thin Films II: New Developments, (23 December 1986); doi: 10.1117/12.939547; https://doi.org/10.1117/12.939547
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