23 December 1986 Optical Thin Film Monitoring Using Optical Fibers
Author Affiliations +
Abstract
A Technique For Monitoring Optical Thin Film Thickness By Direct Evaporation Onto The End Of An Optical Fiber Is Described. The Optical Fiber Is Suspended Inside A Coating Chamber So That The Fiber Distal End Faces The Evaporation Source And Is Illuminated With A Chopped Light Source. The Light Which Is Reflected From The Fiber End Is Returned Through The Fiber And Is Collectyed By A 45° Mirror With A Hole In It. The Signal Is Detected And Displayed On Led Displays And A Chart Recorder. Multiple Fibers Are Used To Monitor Individual Layers In A Stack, Or A Single Fiber Is Used After Cleaving The End With A Tool To Produce A Clean, Flat, Uncoated Surface Without Breaking The Vacuum.
© (1986) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Norman L Thomas, Norman L Thomas, } "Optical Thin Film Monitoring Using Optical Fibers", Proc. SPIE 0678, Optical Thin Films II: New Developments, (23 December 1986); doi: 10.1117/12.939546; https://doi.org/10.1117/12.939546
PROCEEDINGS
7 PAGES


SHARE
RELATED CONTENT

Optical Thin Film Monitoring Using Optical Fibers
Proceedings of SPIE (December 18 1986)
High-mechanical-strength single-pulse draw tower gratings
Proceedings of SPIE (November 15 2004)
High-Speed Ellipsometer For Thin-Film Deposition Monitoring
Proceedings of SPIE (February 26 1989)
Spatially Uniform Detector Assemblies
Proceedings of SPIE (April 28 1982)
Characterization of feathering of optical coating
Proceedings of SPIE (August 19 2010)

Back to Top