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23 December 1986 Quantitative Analysis Of Thin Film Morphology Evolution
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Abstract
There is considerable evidence that thin film morphology, which includes both the film top surface and internal void network structure, is a key link between film preparation processes and resulting film characteristics and properties. Quantitative preparation-property relations can only be obtained after a realistic morphology model is developed in sufficient detail. In this study we consider morphology in the context of our evolutionary structure zone model and introduce several methods for quantifying recorded images of the morphology.
© (1986) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Joseph E Yehoda and Russell Messier "Quantitative Analysis Of Thin Film Morphology Evolution", Proc. SPIE 0678, Optical Thin Films II: New Developments, (23 December 1986); https://doi.org/10.1117/12.939536
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