Optical Thin Film Monitoring Using Optical Fibers

Norman L Thomas

doi:10.1117/12.939570

19 December 1986 Optical Thin Film Monitoring Using Optical Fibers

Norman L Thomas

Proceedings Volume 0679, Current Developments in Optical Engineering and Diffraction Phenomena; (1986) https://doi.org/10.1117/12.939570
Event: 30th Annual Technical Symposium, 1986, San Diego, United States

Abstract

A Technique For Monitoring Optical Thin Film Thickness By Direct Evaporation Onto The End Of An Optical Fiber Is Described. The Optical Fiber Is Suspended Inside A Coating Chamber So That The Fiber Distal End Faces The Evaporation Source And Is Illuminated With A Chopped Light Source. The Light Which Is Reflected From The Fiber End Is Returned Through The Fiber And Is Collectyed By A 45° Mirror With A Hole In It. The Signal Is Detected And Displayed On Led Displays And A Chart Recorder. Multiple Fibers Are Used To Monitor Individual Layers In A Stack, Or A Single Fiber Is Used After Cleaving The End With A Tool To Produce A Clean, Flat, Uncoated Surface Without Breaking The Vacuum.

Citation Download Citation

Norman L Thomas "Optical Thin Film Monitoring Using Optical Fibers", Proc. SPIE 0679, Current Developments in Optical Engineering and Diffraction Phenomena, (19 December 1986); https://doi.org/10.1117/12.939570

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KEYWORDS

Optical fibers

Thin films

Coating

Reflection

Signal detection

Diffraction

Optical engineering

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