19 December 1986 Optical Thin Film Monitoring Using Optical Fibers
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Abstract
A Technique For Monitoring Optical Thin Film Thickness By Direct Evaporation Onto The End Of An Optical Fiber Is Described. The Optical Fiber Is Suspended Inside A Coating Chamber So That The Fiber Distal End Faces The Evaporation Source And Is Illuminated With A Chopped Light Source. The Light Which Is Reflected From The Fiber End Is Returned Through The Fiber And Is Collectyed By A 45° Mirror With A Hole In It. The Signal Is Detected And Displayed On Led Displays And A Chart Recorder. Multiple Fibers Are Used To Monitor Individual Layers In A Stack, Or A Single Fiber Is Used After Cleaving The End With A Tool To Produce A Clean, Flat, Uncoated Surface Without Breaking The Vacuum.
© (1986) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Norman L Thomas, "Optical Thin Film Monitoring Using Optical Fibers", Proc. SPIE 0679, Current Developments in Optical Engineering and Diffraction Phenomena, (19 December 1986); doi: 10.1117/12.939570; https://doi.org/10.1117/12.939570
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