23 March 1987 Comparison Of Profiler Measurements Using Different Magnification Objectives
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Abstract
A WYKO TOPO-2D optical profiler system with four different magnification objectives (2.5X, 10X, 20X and 40X) was used to measure the microroughness properties of a set of five different flat samples. Measurements are compared in terms of the average periodogram for each surface as a function of microscope objective, and the effects of correcting for the transfer function of each objective are assessed.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
P Z Takacs, E L Church, "Comparison Of Profiler Measurements Using Different Magnification Objectives", Proc. SPIE 0680, Surface Characterization and Testing, (23 March 1987); doi: 10.1117/12.939603; https://doi.org/10.1117/12.939603
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