Phase-Measuring Interferometry Performance Parameters

H Philip Stahl

doi:10.1117/12.939588

23 March 1987 Phase-Measuring Interferometry Performance Parameters

H Philip Stahl

Proceedings Volume 0680, Surface Characterization and Testing; (1987) https://doi.org/10.1117/12.939588
Event: 30th Annual Technical Symposium, 1986, San Diego, United States

Abstract

A variety of parameters are currently used to describe the performance of phase-measuring interferometers. Unfortunately, there is very little documentation concerning their definitions, quantifications, and suitabilities. This paper endeavors to address these issues as well as to discuss the theoretical foundations and limitations of specific parameters in hopes of stimulating progress towards a definitive set of phase-measuring interferometric performance parameters.

Citation Download Citation

H Philip Stahl "Phase-Measuring Interferometry Performance Parameters", Proc. SPIE 0680, Surface Characterization and Testing, (23 March 1987); https://doi.org/10.1117/12.939588

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