10 December 1986 CCD's for High Resolution Imaging in the Near and Far UV
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Abstract
This paper describes the development of backside illuminated, deep-depletion charge coupled devices (CCD's) optimized for imaging in the ultraviolet. A model is presented to describe the UV detection process at the CCD backside, and the factors controlling the UV quantum efficiency. A 32 x 32-pixel area imager was obtained with excellent operating characteristics, such as high transport efficiency and low readout rwise. By appropriate treatments of the CCD backside, a quantum efficiency of 20% at 1216 Å was obtained on the best devices. Good resolution was obtained in the visible and UV regions of the spectrum.
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J. T. Bosiers, J. T. Bosiers, N. S. Saks, N. S. Saks, D. McCarthy, D. McCarthy, M. C. Peckerar, M. C. Peckerar, D. J. Michels, D. J. Michels, } "CCD's for High Resolution Imaging in the Near and Far UV", Proc. SPIE 0687, Ultraviolet Technology, (10 December 1986); doi: 10.1117/12.936551; https://doi.org/10.1117/12.936551
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