Characterization of Multilayer Structures for Soft X-ray Dispersion

J. V. Gilfrich; D. B. Brown; D. Rosen

doi:10.1117/12.964831

Translator Disclaimer

9 April 1987 Characterization of Multilayer Structures for Soft X-ray Dispersion

J. V. Gilfrich, D. B. Brown, D. Rosen

Author Affiliations +

Proceedings Volume 0688, Multilayer Structures & Laboratory X-Ray Laser Research; (1987) https://doi.org/10.1117/12.964831
Event: 30th Annual Technical Symposium, 1986, San Diego, United States

Abstract

The use of multilayer structures for soft x-ray spectroscopy requires an accurate knowledge of their reflection properties. In this paper, measurements and calculations will be presented for the single crystal integral reflection coefficients of several multilayer structures. Experimental results will be presented for wavelengths from about 0.8 to 1.4 nm. The measured integral reflection coefficients were smaller than those calculated for a perfect multilayer structure, in agreement with previous results. This reduction of diffraction efficiency is due to imperfections in the multilayer structure. Introduction of appropriate defect structure into the computational methods will be discussed. Evidence will be presented that the effect of substrate roughness is dominant.

Citation Download Citation

J. V. Gilfrich, D. B. Brown, and D. Rosen "Characterization of Multilayer Structures for Soft X-ray Dispersion", Proc. SPIE 0688, Multilayer Structures & Laboratory X-Ray Laser Research, (9 April 1987); https://doi.org/10.1117/12.964831

ACCESS THE FULL ARTICLE