9 April 1987 Recent Developments With Metal-Oxide Multilayered U.V. Mirrors
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Abstract
In a previous paper on Si-SiO2 multilayered mirrors (1), we have shown that metal-oxyde systems can be an interesting alternative to metal-metal multilayered coatings for XUV optics in the range from 10 nm to 60 nm. In this paper, we report experimental results of studies made on : a) an Si-Si02 Fabry-Perot etalon b) an Al-Si02 multilayered mirror c) an Al-A1203 multilayered mirror
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tran Khanh Vien, J. P. Delaboudiniere, Y. Lepetre, "Recent Developments With Metal-Oxide Multilayered U.V. Mirrors", Proc. SPIE 0688, Multilayer Structures & Laboratory X-Ray Laser Research, (9 April 1987); doi: 10.1117/12.964833; https://doi.org/10.1117/12.964833
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