Paper
9 April 1987 Soft X-Ray Beamsplitters And Highly Dispersive Multilayer Mirrors For Use As Soft X-Ray Laser Cavity Components
Andrew M. Hawryluk, Natale M. Ceglio, Daniel G. Stearns, K. Danzmann, M. Kuhne, P. Muller, B. Wende
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Abstract
The demonstration of amplified spontaneous emission at soft x-ray wavelengths has highlighted the need for normal incidence optics for soft x-rays. Specifically, x-ray laser cavity components will be needed to further advances in x-ray laser research. In this paper, we present the fabrication, characterization and analysis of two possible cavity components, an x-ray beamsplitter and a highly dispersive multilayer mirror. Each of these can be used as x-ray laser cavity output couplers.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Andrew M. Hawryluk, Natale M. Ceglio, Daniel G. Stearns, K. Danzmann, M. Kuhne, P. Muller, and B. Wende "Soft X-Ray Beamsplitters And Highly Dispersive Multilayer Mirrors For Use As Soft X-Ray Laser Cavity Components", Proc. SPIE 0688, Multilayer Structures & Laboratory X-Ray Laser Research, (9 April 1987); https://doi.org/10.1117/12.964826
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CITATIONS
Cited by 18 scholarly publications and 1 patent.
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KEYWORDS
Mirrors

X-rays

Gold

Modulation

Etching

Silicon

Beam splitters

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