12 August 1986 The Soft X-Ray/EUV Calibration Facility at the University of Colorado
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The calibration facility at the University of Colorado is being used to evaluate the performance of optics in the soft x-ray and EUV. Using either a hollow cathode gas discharge EUV source or a focussed electron impact x-ray source, we are able to generate light with wavelengths ranging from 2.7 A to 2500 A. Monochromaticity is achieved with a grazing incidence monochromator and filters. The light enters a large vacuum chamber where it illuminates the sample being studied. Standard detectors include a flowing gas proportional counter, a resistive anode MCP, and an NBS photodiode. The optics and detectors are remotely positioned inside the vacuum chamber using computer controlled stepping motor stages. Data acquisition is also computer controlled. Further data processing is performed on a VAX 8600. We have used the facility to evaluate the performance of diffraction gratings, multilayer mirrors, reflective coatings, spectrographs, surface roughness scattering, and absolute detector efficiencies. We present a complete description of the instrumentation and some recent results.
© (1986) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
David L. Windt, David L. Windt, Webster Cash, Webster Cash, } "The Soft X-Ray/EUV Calibration Facility at the University of Colorado", Proc. SPIE 0689, X-Ray Calibration: Techniques, Sources, and Detectors, (12 August 1986); doi: 10.1117/12.936579; https://doi.org/10.1117/12.936579

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