Structural Depth Profiling by Glancing Angle X-ray Diffraction

B. R. York; A. B. Austin

doi:10.1117/12.936610

12 August 1986 Structural Depth Profiling by Glancing Angle X-ray Diffraction

B. R. York, A. B. Austin

Proceedings Volume 0690, X-Rays in Materials Analysis: Novel Applications and Recent Developments; (1986) https://doi.org/10.1117/12.936610
Event: 30th Annual Technical Symposium, 1986, San Diego, United States

Abstract

Presented here is a technique to structurally depth profile multilayer films using a Seemann-Bohlin triple axis x-ray diffractometer and a 12 kW rotation anode x-ray source. This paper discusses the Seemann-Bohlin geometry and aberrations related to depth profiling and refraction. The technique was successfully applied to multilayer metallic-thin films a few hundred angstroms thick and demonstrated to have an excellent sensitivity to ultra thin-metallic films less than 25 angstroms thick.

Citation Download Citation

B. R. York and A. B. Austin "Structural Depth Profiling by Glancing Angle X-ray Diffraction", Proc. SPIE 0690, X-Rays in Materials Analysis: Novel Applications and Recent Developments, (12 August 1986); https://doi.org/10.1117/12.936610

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