10 July 1987 High Resolution Optical Metrology And Edge Detection Using A Pc-Controlled Smart CCD Camera
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Proceedings Volume 0701, 1986 European Conf on Optics, Optical Systems and Applications; (1987) https://doi.org/10.1117/12.937063
Event: 1986 International European Conference on Optics, Optical Systems, and Applications, 1986, Florence, Italy
Abstract
The excellent properties of a PC-controlled smart CCD camera have been combined with a novel digital edge localization algorithm to produce a high-resolution instrument for optical metrology with the capability of determining edge positions to better than 1% of the pixel dimensions.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
M. T. Gale, M. T. Gale, P. Seitz, P. Seitz, } "High Resolution Optical Metrology And Edge Detection Using A Pc-Controlled Smart CCD Camera", Proc. SPIE 0701, 1986 European Conf on Optics, Optical Systems and Applications, (10 July 1987); doi: 10.1117/12.937063; https://doi.org/10.1117/12.937063
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