10 July 1987 Monitoring Of Optical Coatings Of Fractional Layer Thicknesses
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Proceedings Volume 0701, 1986 European Conf on Optics, Optical Systems and Applications; (1987) https://doi.org/10.1117/12.937066
Event: 1986 International European Conference on Optics, Optical Systems, and Applications, 1986, Florence, Italy
Abstract
Three methods are proposed for monitoring thin film optical coatings of non-quarterwave-length thicknesses during deposition. These are the turning value method, the inflection point method and the second harmonic method. The advantages of these methods are that they are monochromatic and that they do not rely on any absolute measurements of transmittance during monitoring.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
T. Skettrup, T. Skettrup, } "Monitoring Of Optical Coatings Of Fractional Layer Thicknesses", Proc. SPIE 0701, 1986 European Conf on Optics, Optical Systems and Applications, (10 July 1987); doi: 10.1117/12.937066; https://doi.org/10.1117/12.937066
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