18 May 1987 A New Approach For Thickness Modulation Measurement From Diffraction Data For Nonlinear Recording Materials
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Proceedings Volume 0702, International Topical Meeting on Image Detection and Quality; (1987) https://doi.org/10.1117/12.966800
Event: International Topical Meeting on Image Detection and Quality, 1986, Paris, France
Abstract
A differential method based on diffraction from a low modulated holographic grating is aprlied for measuring the thickness modulation of a positive photoresist via its rate of development. Real-time measurements are performed during wet development and results are compared with simultaneously measured reflectivity interference curves.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. Frejlich, J. Frejlich, L. Cescato, L. Cescato, G. F. Mendes, G. F. Mendes, } "A New Approach For Thickness Modulation Measurement From Diffraction Data For Nonlinear Recording Materials", Proc. SPIE 0702, International Topical Meeting on Image Detection and Quality, (18 May 1987); doi: 10.1117/12.966800; https://doi.org/10.1117/12.966800
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