Imaging Of Thick Phase Gratings

R. A. Rupp; G. Wittenbecher; E. Kratzig

doi:10.1117/12.966795

18 May 1987 Imaging Of Thick Phase Gratings

R. A. Rupp, G. Wittenbecher, E. Kratzig

Proceedings Volume 0702, International Topical Meeting on Image Detection and Quality; (1987) https://doi.org/10.1117/12.966795
Event: International Topical Meeting on Image Detection and Quality, 1986, Paris, France

Abstract

Imaging by a transmission microscope and microphotometry are the basis of a new method to analyze thick refractive index gratings. The method permits to determine not only the fundamental and higher Fourier coefficients of the dielectric grating, but also their phase relationship. It is shown, how gratings with a depths profile can be analyzed.

Citation Download Citation

R. A. Rupp, G. Wittenbecher, and E. Kratzig "Imaging Of Thick Phase Gratings", Proc. SPIE 0702, International Topical Meeting on Image Detection and Quality, (18 May 1987); https://doi.org/10.1117/12.966795

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available